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New gas circulation RIE

Dates

Publication Year
2000
Publication Date
2000-08

Citation

Tokuhisa Ohiwa, Itsuko Sakai, and Katsuya Okumura, New gas circulation RIE: IEEE Transactions on Semiconductor Manufacturing [IEEE Trans Semicond Manuf], vol. 13, no. 3, pp. 310-314, Aug 2000.

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Rights

This metadata record is the intellectual property of CSA/ProQuest, and was licensed for use under a contract with the USGS to support scientific research and understanding. As such, this copyrighted material should not be electronically reproduced or shared outside of ScienceBase.

Additional Information

Identifiers

Type Scheme Key
ID CSA 8699
ISSN CSA 0894-6507
Accession Number CSA 0501775

Citation Extension

citationTypeJournal Article
journalIEEE Transactions on Semiconductor Manufacturing [IEEE Trans Semicond Manuf], vol. 13, no. 3, pp. 310-314, Aug 2000
languageEnglish

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